Poly-SiGe for MEMS-above-CMOS Sensors - Springer Series in Advanced Microelectronics - Pilar Gonzalez Ruiz - Books - Springer - 9789401781404 - August 8, 2015
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Pilar Gonzalez Ruiz
Poly-SiGe for MEMS-above-CMOS Sensors - Springer Series in Advanced Microelectronics Softcover reprint of the original 1st ed. 2014 edition

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Poly-SiGe for MEMS-above-CMOS sensors demonstrates the compatibility of poly-SiGe with post-processing above the advanced CMOS technology nodes through the successful fabrication of an integrated poly-SiGe piezoresistive pressure sensor, directly fabricated above 0.13 ?m Cu-backend CMOS.

199 pages, 144 Illustrations, color; XVI, 199 p. 144 illus. in color.

Media Books     Paperback Book   (Book with soft cover and glued back)
Released August 8, 2015
ISBN13 9789401781404
Publishers Springer
Genre Aspects (Academic) > Science / Technology Aspects
Pages 199
Dimensions 155 × 235 × 12 mm   ·   308 g

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