Poly-SiGe for MEMS-above-CMOS Sensors - Springer Series in Advanced Microelectronics - Pilar Gonzalez Ruiz - Books - Springer - 9789400767980 - July 30, 2013
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Pilar Gonzalez Ruiz
Poly-SiGe for MEMS-above-CMOS Sensors - Springer Series in Advanced Microelectronics 2014 edition

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Poly-SiGe for MEMS-above-CMOS sensors demonstrates the compatibility of poly-SiGe with post-processing above the advanced CMOS technology nodes through the successful fabrication of an integrated poly-SiGe piezoresistive pressure sensor, directly fabricated above 0.13 ?m Cu-backend CMOS.

216 pages, 144 black & white illustrations, biography

Media Books     Hardcover Book   (Book with hard spine and cover)
Released July 30, 2013
ISBN13 9789400767980
Publishers Springer
Pages 199
Dimensions 155 × 235 × 14 mm   ·   480 g

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