Scanning Probe Lithography - Microsystems - Hyongsok T. Soh - Books - Springer-Verlag New York Inc. - 9781441948946 - December 8, 2010
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Hyongsok T. Soh
Scanning Probe Lithography - Microsystems Softcover reprint of hardcover 1st ed. 2001 edition

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Scanning Probe Lithography (SPL) describes recent advances in the field of scanning probe lithography, a high resolution patterning technique that uses a sharp tip in close proximity to a sample to pattern nanometer-scale features on the sample.

220 pages, 193 black & white illustrations, biography

Media Books     Paperback Book   (Book with soft cover and glued back)
Released December 8, 2010
ISBN13 9781441948946
Publishers Springer-Verlag New York Inc.
Pages 197
Dimensions 155 × 235 × 12 mm   ·   317 g
Language English  

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