Scanning Probe Lithography - Microsystems - Hyongsok T. Soh - Books - Springer - 9780792373612 - June 30, 2001
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Hyongsok T. Soh
Scanning Probe Lithography - Microsystems 2001 edition

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Scanning Probe Lithography (SPL) describes recent advances in the field of scanning probe lithography, a high resolution patterning technique that uses a sharp tip in close proximity to a sample to pattern nanometer-scale features on the sample.

197 pages, biography

Media Books     Hardcover Book   (Book with hard spine and cover)
Released June 30, 2001
ISBN13 9780792373612
Publishers Springer
Pages 197
Dimensions 155 × 235 × 14 mm   ·   498 g
Language English  

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