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Micro-Nano Manufacturing and Micro-Electro-Mechanical Systems Jingmin Li
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Micro-Nano Manufacturing and Micro-Electro-Mechanical Systems
Jingmin Li
This book is a well-structured textbook that systematically introduces the basic concepts, process technologies, typical devices, and system applications related to micro-nano manufacturing and micro-electromechanical systems (MEMS).
| Media | Books Hardcover Book (Book with hard spine and cover) |
| Released | April 24, 2026 |
| ISBN13 | 9789819547579 |
| Publishers | Springer Verlag, Singapore |
| Pages | 349 |
| Dimensions | 150 × 220 × 20 mm · 775 g |
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