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Multilayer Integrated Film Bulk Acoustic Resonators Yafei Zhang 2013 edition
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Multilayer Integrated Film Bulk Acoustic Resonators
Yafei Zhang
This book surveys the theory, design, fabrication and application multilayer integrated film bulk acoustic resonators. Covers use in integrated circuits, optical devices, acoustic resonators, micro-nano manufacturing, multilayer integration, and more.
154 pages, biography
| Media | Books Hardcover Book (Book with hard spine and cover) |
| Released | August 28, 2012 |
| ISBN13 | 9783642317750 |
| Publishers | Springer-Verlag Berlin and Heidelberg Gm |
| Pages | 154 |
| Dimensions | 155 × 235 × 11 mm · 358 g |
| Language | English |
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