Ultraclean Surface Processing of Silicon Wafers: Secrets of VLSI Manufacturing - Hattori - Books - Springer-Verlag Berlin and Heidelberg Gm - 9783540616726 - September 17, 1998
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Hattori
Ultraclean Surface Processing of Silicon Wafers: Secrets of VLSI Manufacturing 1998 edition

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This book thus opens the door to the manufacturing of reliable nanoscale devices and will be extremely useful for every engineer, physicist and technician involved in the production of silicon semiconductor devices.

616 pages, biography

Media Books     Hardcover Book   (Book with hard spine and cover)
Released September 17, 1998
ISBN13 9783540616726
Publishers Springer-Verlag Berlin and Heidelberg Gm
Pages 616
Dimensions 140 × 216 × 39 mm   ·   1.12 kg
Translator Hattori, T.
Translator Heusler, S.
Translator Webb, J.P.

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