Integrated Chemical Microsensor Systems in CMOS Technology - Microtechnology and MEMS - Andreas Hierlemann - Books - Springer-Verlag Berlin and Heidelberg Gm - 9783540237822 - February 21, 2005
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Andreas Hierlemann
Integrated Chemical Microsensor Systems in CMOS Technology - Microtechnology and MEMS 2005 edition

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Covers CMOS chemical microsensor systems. This book presents information on important issues related to the realization of chemical microsensors in CMOS technology. It also presents the fundamentals of chemical sensing.

230 pages, 120 black & white illustrations, 5 colour illustrations, biography

Media Books     Hardcover Book   (Book with hard spine and cover)
Released February 21, 2005
ISBN13 9783540237822
Publishers Springer-Verlag Berlin and Heidelberg Gm
Pages 230
Dimensions 155 × 235 × 15 mm   ·   521 g
Language English   German  

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