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Outlook and Challenges of Nano Devices, Sensors, and MEMS Softcover reprint of the original 1st ed. 2017 edition
Outlook and Challenges of Nano Devices, Sensors, and MEMS
This book provides readers with an overview of the design, fabrication, simulation, and reliability of nanoscale semiconductor devices, MEMS, and sensors, as they serve for realizing the next-generation internet of things.
521 pages, 25 Tables, color; 272 Illustrations, color; 95 Illustrations, black and white; XVI, 521 p
| Media | Books Paperback Book (Book with soft cover and glued back) |
| Released | July 13, 2018 |
| ISBN13 | 9783319845005 |
| Publishers | Springer International Publishing AG |
| Pages | 521 |
| Dimensions | 150 × 220 × 10 mm · 748 g |
| Language | German |
| Editor | Li, Ting |
| Editor | Liu, Ziv |