Design for Manufacturability with Advanced Lithography - Bei Yu - Books - Springer International Publishing AG - 9783319373935 - August 23, 2016
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Design for Manufacturability with Advanced Lithography Softcover reprint of the original 1st ed. 2016 edition

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This book introduces readers to the most advanced research results on Design for Manufacturability (DFM) with multiple patterning lithography (MPL) and electron beam lithography (EBL).


164 pages, 35 Tables, black and white; XI, 164 p.

Media Books     Paperback Book   (Book with soft cover and glued back)
Released August 23, 2016
ISBN13 9783319373935
Publishers Springer International Publishing AG
Pages 164
Dimensions 150 × 220 × 10 mm   ·   258 g
Language German  

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