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Ion Implantation and Annealing Applications, Science and Technology: Contributions from IIT School, Edition 2024 - Topics in Applied Physics
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Ion Implantation and Annealing Applications, Science and Technology: Contributions from IIT School, Edition 2024 - Topics in Applied Physics
It covers the history of integrated circuits, common applications in CMOS technology, ion sources, radiation damage, annealing of materials like silicon (Si), silicon carbide (SiC) and gallium nitride (GaN), and advances in cluster ion beam technology.
| Media | Books Hardcover Book (Book with hard spine and cover) |
| Released | May 30, 2026 |
| ISBN13 | 9783032100078 |
| Publishers | Springer Nature Switzerland AG |
| Pages | 628 |
| Dimensions | 150 × 220 × 20 mm · 1.11 kg |
| Language | German |
| Editor | Current, Michael |
| Editor | Lerch, Wilfried |
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