Chemical Vapor Deposition: Thermal and Plasma Deposition of Electronic Materials - Srinivasan Sivaram - Books - Springer-Verlag New York Inc. - 9781475747539 - June 22, 2013
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Srinivasan Sivaram
Chemical Vapor Deposition: Thermal and Plasma Deposition of Electronic Materials Softcover reprint of the original 1st ed. 1995 edition

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Later Van Nostrand agreed to publish my book as a text intended for students at the senior/first year graduate level and for process engineers in the microelectronics industry, This book is not intended to be bibliographical, and it does not cover every new material being studied for chemical vapor deposition.

304 pages, 143 black & white illustrations, biography

Media Books     Paperback Book   (Book with soft cover and glued back)
Released June 22, 2013
ISBN13 9781475747539
Publishers Springer-Verlag New York Inc.
Pages 292
Dimensions 155 × 235 × 17 mm   ·   435 g
Language English  

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