Silicon Nitride for Microelectronic Applications: Part 1 Preparation and Properties - John T. Milek - Books - Springer-Verlag New York Inc. - 9781468461640 - January 21, 2013
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John T. Milek
Silicon Nitride for Microelectronic Applications: Part 1 Preparation and Properties Softcover reprint of the original 1st ed. 1971 edition

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2 References 4 Methods of Preparation * 5 Introduction * 5 Direct Nitridation Method 8 Evaporation Method * 9 Glow Discharge Method.

118 pages, 2 black & white illustrations

Media Books     Paperback Book   (Book with soft cover and glued back)
Released January 21, 2013
Original release date 1971
ISBN13 9781468461640
Publishers Springer-Verlag New York Inc.
Pages 118
Dimensions 210 × 279 × 6 mm   ·   303 g
Language English  

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