Atomic Layer Deposition for Semiconductors - Cheol Seong Hwang - Books - Springer-Verlag New York Inc. - 9781461480532 - October 19, 2013
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Cheol Seong Hwang
Atomic Layer Deposition for Semiconductors 2014 edition

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Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.

300 pages, 89 black & white illustrations, 81 colour illustrations, 3 black & white tables, 1 colour

Media Books     Hardcover Book   (Book with hard spine and cover)
Released October 19, 2013
ISBN13 9781461480532
Publishers Springer-Verlag New York Inc.
Pages 263
Dimensions 155 × 235 × 20 mm   ·   521 g
Language English  
Editor Hwang, Cheol Seong

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