Photonic Microsystems: Micro and Nanotechnology Applied to Optical Devices and Systems - MEMS Reference Shelf - Olav Solgaard - Books - Springer-Verlag New York Inc. - 9781441939678 - November 9, 2010
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Olav Solgaard
Photonic Microsystems: Micro and Nanotechnology Applied to Optical Devices and Systems - MEMS Reference Shelf Softcover reprint of hardcover 1st ed. 2009 edition

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This book describes Microelectromechanical systems (MEMS) technology and demonstrates how MEMS allow miniaturization, parallel fabrication, and efficient packaging of optics, as well as integration of optics and electronics.

648 pages, black & white illustrations

Media Books     Paperback Book   (Book with soft cover and glued back)
Released November 9, 2010
ISBN13 9781441939678
Publishers Springer-Verlag New York Inc.
Pages 632
Dimensions 155 × 235 × 33 mm   ·   893 g

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