Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set - Madou, Marc J. (University of California, Irvine, USA) - Books - Taylor & Francis Inc - 9780849331800 - August 1, 2011
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Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set 3rd edition

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Offers a complete MEMS and NEMS reference. Discussing a variety of approaches, this title includes developments in design packages, DNA and protein array, and fluidics. It also includes a section on nanotechnology applications and a chapter on nanomachining. It also provides both classroom and self-learners with worked-out example problems.


1992 pages, 1887 colour illustrations, 305 black & white tables

Media Books     Book
Released August 1, 2011
ISBN13 9780849331800
Publishers Taylor & Francis Inc
Pages 1992
Dimensions 292 × 226 × 111 mm   ·   5.73 kg
Language English  

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