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Run-to-Run Control in Semiconductor Manufacturing Duane S. Boning 1st edition
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Run-to-Run Control in Semiconductor Manufacturing
Duane S. Boning
Offers analyses of run-to-run (R2R) control. Through manufacturing case studies, this book provides justification for and demonstrates the benefits of run-to-run control, and offers the know-how and direction for incorporating R2R control into readers' manufacturing capabilities.
368 pages, 27 black & white tables
| Media | Books Hardcover Book (Book with hard spine and cover) |
| Released | November 30, 2000 |
| ISBN13 | 9780849311789 |
| Publishers | Taylor & Francis Inc |
| Pages | 366 |
| Dimensions | 158 × 242 × 22 mm · 630 g |
| Language | English |
| Editor | Del Castillo, Enrique (Pennsylvania State University, University Park, Usa) |
| Editor | Hurwitz, Arnon M. (Friendswood, Texas, USA) |
| Editor | Moyne, James (University of Michigan, Ann Arbor, USA) |
