Crystal Growth and Evaluation of Silicon for VLSI and ULSI - Eranna, Golla (Central Electronics Engineering Research Institute (CEERI), Pilani, India) - Books - Taylor & Francis Inc - 9781482232813 - December 8, 2014
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Eranna, Golla (Central Electronics Engineering Research Institute (CEERI), Pilani, India)
Crystal Growth and Evaluation of Silicon for VLSI and ULSI 1st edition

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Written for engineers and researchers working in semiconductor fabrication industries, this book discusses the systematic growth of Si single crystals using standard techniques with add-on layers for specific applications. It is one of the first books to cover the complete evaluation of Si wafers, from sand to useful wafers for device fabrication. The book shows how to evaluate the suitability of Si wafers in VLSI and ULSI processing technology before implementing the highly sophisticated and systematically drawn process methodology.

430 pages, 264 black & white illustrations, 23 black & white tables

Media Books     Hardcover Book   (Book with hard spine and cover)
Released December 8, 2014
ISBN13 9781482232813
Publishers Taylor & Francis Inc
Pages 430
Dimensions 178 × 254 × 28 mm   ·   952 g
Language English  

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